Recently we successfully made the largest substrate (glass) cleaner ever and delivered to the customer (a big Japanese company).
The size of the glass to be cleaned is 3,000 x 3,400 mm with the thickness of 0.4-0.5 mm. This size is categorized as G(Generation) 11 and the largest ever made in the world. Engineering-wise, distortion of the system was a key issue to enable the cleaning of particle evenly all through the huge flat surface.
In the next news, we will be able to report the substrate cleaner for the thinnest glass on the smallest category.